产品详情
简单介绍：
详情介绍：
Edwards iH80 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
| Peak speed |
103 m3h-1 61 cfm 1,717 lmin-1 |
| Ultimate vacuum |
1 x 10-2 mbar 7.5 x 10-3 Torr 1 Pa |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet connection | ISO63 |
| Outlet connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop |
120 lh-1 2 lmin-1 |
| Weight | 240 kg |
| Power input at ultimate | 2.7 kW |
| Rated motor power | 3.5 kW |
| Oil capacity | 0.7 l |
All figures are typical without gas ballast.
Edwards iH80 Semiconductor Dry Vacuum Pump - NEW A59000908 / A590-00-908 iH80 MK5 460V 60Hz three-phase A59000945 / A590-00-945 iH80 MK5 200/208V 50/60Hz 3-phase A59000946 / A590-00-946 iH80 MK5 380/415V 50Hz 3-phase A59000957 / A590-00-957 iH80 MK5 230V 60Hz 3-phase
