产品详情
  • 产品名称:真空传输阀 V78-P_I-Motion Type

  • 产品型号:
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
详情介绍:

Valve Outside

Fitting Standard Non Standard
Gate Size (mm) 51mm x 420mm
Pressure Range 1.0xE-4 Pa to 1.2xE5 Pa(abs)
Helium Leak Rate External < 1.0xE-6 Pa*㎥/sec
Internal < 1.0xE-5 Pa*㎥/sec
Feed Through Welded Bellows Seal
Pneumatic Actuator Type Double Acting
Air Connection OD Ø 6, Speed Controller (Meter-out)
Air Pressure 0.5 Mpa
(Tolerance level : 0.45 ~ 0.6 MPa)
Air Less Lock Open N/A
Close N/A
Life Cycles Mechanism 2,000,000
Bellows 2,000,000
O-Ring (Seal) 1,000,000
lubrication 1,000,000
Temperature Gate(Seat) ≤ 120°C
Actuator ≤ 60°C
Lubrication Vacuum inside Non lubrication
Mechanism PFPE Grease
Materials Valve Body AL6061
Gate(Seat) AL6061
Bonnet AL6061
Shaft(stem) STS304
Mechanism(Cylinder) AL6061,STS304
Bellows AM350
Bellows End Piece STS316L
Vacuum Seal FKM
Pneumatic Seal FKM
Surface Treatment Valve Body Anodizing
Gate(Seat) Anodizing

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