产品详情
简单介绍：
详情介绍：
| Fitting Standard | SEMI E21.1-1296 | ||
|---|---|---|---|
| Gate Size (mm) | 50mm x 336mm | ||
| Pressure Range | 1.0 X E-4 ~ 1.2 X E5 Pa (abs) | ||
| Helium Leak Rate | TM Valve | External | < 1.0 X E-10 Pa*m³/sec |
| Internal | < 1.0 X E-10 Pa*m³/sec | ||
| L/L Valve | External | < 1.0 X E-10 Pa*m³/sec | |
| Internal | < 1.0 X E-8 Pa*m³/sec | ||
| Feed Through | TM Valve | O-Ring Seal | |
| L/L Valve | Welded Bellows Seal | ||
| Actuator Type | PM _ Double Acting , TM _ Manual | ||
| Air Connection | OD Ø6 / one-touch type / Speed Controller (Meter-out) | ||
| Air Pressure |
0.5 Mpa (Tolerance level : 0.45 ~ 0.6 MPa) |
||
| Life Cycles | TM VALVE | 1,000,000 | |
| PM VALVE | 3,000,000 | ||
| Temperature | Housing | ≤ 120℃ | |
| Actuator | ≤ 60℃ | ||
| Lubrication | Vacuum inside | Non lubrication | |
| Mechanism | PFPE Grease | ||
| Air Cylinder | PAO Grease | ||
| Materials | Valve Housing | AL 6061 | |
| Gate(Seat) | AL 6061 | ||
| Bonnet | AL 6061 | ||
| Shaft(stem) | STS 304 | ||
| Bellows | AM350 | ||
| Bellows End Piece | STS 316L | ||
| Gate Seal | TM Valve | FKM | |
| L/L Valve | FFKM | ||
| Vacuum Seal | FKM | ||
| Pneumatic Seal | FKM | ||
| Surface Treatment | Valve Housing |
Hard Anodizing (<50 ㎛, Seal Surface :Bare) |
|
| Gate (Seat) |
PM :Anodizing (Surface :Bare) TM : Anodizing |
||
