产品详情
简单介绍：
详情介绍：
Edwards iXH610 HV Semiconductor Dry Vacuum Pump
Features include:
- More process capability
- Greatly increased powder handling capability and innova ve Gas BusterTM technology
- Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
- Innovative pump seal technology to lengthen process life and reduce leakage risks
- High capacity dry pumps and boosters give an expanded process window to enhance yields
- Reduced cost of ownership
- 10% less energy consump on than the previous model
- SEMI® E54 compatible and Green Mode capable
- Longer overhaul intervals and less unscheduled down me
- Complies with key interna onal standards including UL, CE and S2
| Dry pump size | 100 m3/h |
| Booster size | 600 m3/h |
| Peak speed | 665 m3/h |
| Ultimate vac (typical) | 3.7 x 10-3 Torr |
| System power at ult. | 2.6 kW |
| Inlet connection | ISO 100 |
| Outlet connection | NW 40 |
| Typical water flow | 3 l/m |
| Purge flow range | 22/44 slm |
| Weight | 355 kg |
Edwards iXH610 HV Semiconductor Dry Vacuum Pump ACB102121100
